Dr. Ingo Ortlepp seminar: Nanopositioning and Nanomeasuring Technology for Traceable 3D Nanofabrication and Surface Inspection

March 1, 2024

Nanopositioning and Nanomeasuring Technology for Traceable 3D Nanofabrication and Surface Inspection

Dr. Ingo Ortlepp, Technical University Ilmenau, Germany

3:00 pm, ECE Building, Room 118
Online Guests: Contact Prof. Osiński <osinski@chtm.unm.edu> for a Zoom link

Abstract: Nanopositioning and nanomeasuring machines (NPMMs) have proven their potential for nanometer accurate measurements in volumes up to 200 mm x 200 mm x 25 mm with 5 axis operation in several fields. As these machines offer picometer resolution and nanometer uncertainty, the goal is to transfer their precision to fabrication and patterning. So far, our NPMMs have been equipped with laserbased and tip-based tools (1PP, 2PP, NIL, AFM, SPL) and combinations thereof. The goal is basic research on these technologies, to estimate the potential for later use in an industrial scale. The talk will describe the basics and parameters of NPMMs and the nanofabrication tools that we are currently working on. Focus is on the parameters in measurement mode and the accomplished fabrication results.

Bio: Dr. Ingo Ortlepp is a postdoc at the Institute for Process Measurement and Sensor Technology at TU Ilmenau and managing director of the research training Group NanoFab there. His research fields are dimensional metrology, in particular interferometry (concepts, optics, signal processing, laser sources), nanopositioning and nanomeasuring machines (concepts, mechanics, measuring strategies) and tools for measuring and patterning (optical, tip-based). He received his diploma in mechanical engineering from and in 2007, and his PhD in 2020 in the field of standing wave interferometry, both from TU Ilmenau.